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Kenji SUGAKAWA
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Koshi City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Bonding apparatus and bonding method
Patent number
11,837,574
Issue date
Dec 5, 2023
Tokyo Electron Limited
Kenji Sugakawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,735,465
Issue date
Aug 22, 2023
Tokyo Electron Limited
Kenji Sugakawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonding apparatus, bonding system, bonding method and recording medium
Patent number
11,715,663
Issue date
Aug 1, 2023
Tokyo Electron Limited
Kenji Sugakawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,482,431
Issue date
Oct 25, 2022
Tokyo Electron Limited
Kimio Motoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonding apparatus and bonding system
Patent number
11,164,842
Issue date
Nov 2, 2021
Tokyo Electron Limited
Yosuke Omori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonding apparatus, bonding system, bonding method and storage medium
Patent number
10,985,132
Issue date
Apr 20, 2021
Tokyo Electron Limited
Yoshitaka Otsuka
B32 - LAYERED PRODUCTS
Information
Patent Grant
Bonding system and bonding method
Patent number
10,847,495
Issue date
Nov 24, 2020
Tokyo Electron Limited
Atsushi Nagata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonding apparatus, bonding system, bonding method and storage medium
Patent number
10,756,046
Issue date
Aug 25, 2020
Tokyo Electron Limited
Yoshitaka Otsuka
B32 - LAYERED PRODUCTS
Information
Patent Grant
Bonding apparatus, bonding system, bonding method and storage medium
Patent number
10,438,920
Issue date
Oct 8, 2019
Tokyo Electron Limited
Yoshitaka Otsuka
B32 - LAYERED PRODUCTS
Information
Patent Grant
Bonding apparatus and bonding system
Patent number
10,438,918
Issue date
Oct 8, 2019
Tokyo Electron Limited
Yosuke Omori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonding method, storage medium, bonding apparatus and bonding system
Patent number
9,741,595
Issue date
Aug 22, 2017
Tokyo Electron Limited
Kenji Sugakawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
BONDING APPARATUS, BONDING SYSTEM, AND BONDING METHOD
Publication number
20240304475
Publication date
Sep 12, 2024
TOKYO ELECTRON LIMITED
Kenji Sugakawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PLACING METHOD
Publication number
20240282617
Publication date
Aug 22, 2024
TOKYO ELECTRON LIMITED
Kimio Motoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PLACING METHOD
Publication number
20240274462
Publication date
Aug 15, 2024
TOKYO ELECTRON LIMITED
Makoto Fujiwara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230014665
Publication date
Jan 19, 2023
TOKYO ELECTRON LIMITED
Kimio Motoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BONDING APPARATUS AND BONDING METHOD
Publication number
20210358879
Publication date
Nov 18, 2021
TOKYO ELECTRON LIMITED
Kenji Sugakawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BONDING APPARATUS, BONDING SYSTEM, BONDING METHOD AND RECORDING MEDIUM
Publication number
20210272836
Publication date
Sep 2, 2021
TOKYO ELECTRON LIMITED
Kenji Sugakawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20210035827
Publication date
Feb 4, 2021
TOKYO ELECTRON LIMITED
Kimio Motoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20200365442
Publication date
Nov 19, 2020
TOKYO ELECTRON LIMITED
Kenji Sugakawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Bonding Apparatus, Bonding System, Bonding Method and Storage Medium
Publication number
20200343216
Publication date
Oct 29, 2020
TOKYO ELECTRON LIMITED
Yoshitaka OTSUKA
B32 - LAYERED PRODUCTS
Information
Patent Application
BONDING APPARATUS AND BONDING SYSTEM
Publication number
20190385971
Publication date
Dec 19, 2019
TOKYO ELECTRON LIMITED
Yosuke Omori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Bonding Apparatus, Bonding System, Bonding Method and Storage Medium
Publication number
20190385973
Publication date
Dec 19, 2019
TOKYO ELECTRON LIMITED
Yoshitaka OTSUKA
B32 - LAYERED PRODUCTS
Information
Patent Application
BONDING SYSTEM AND BONDING METHOD
Publication number
20190312007
Publication date
Oct 10, 2019
TOKYO ELECTRON LIMITED
Atsushi Nagata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BONDING APPARATUS, BONDING SYSTEM, BONDING METHOD AND STORAGE MEDIUM
Publication number
20180158796
Publication date
Jun 7, 2018
TOKYO ELECTRON LIMITED
Yoshitaka OTSUKA
B32 - LAYERED PRODUCTS
Information
Patent Application
BONDING APPARATUS AND BONDING SYSTEM
Publication number
20180047699
Publication date
Feb 15, 2018
TOKYO ELECTRON LIMITED
Yosuke Omori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Bonding Method, Storage Medium, Bonding Apparatus and Bonding System
Publication number
20160155721
Publication date
Jun 2, 2016
TOKYO ELECTRON LIMITED
Kenji SUGAKAWA
H01 - BASIC ELECTRIC ELEMENTS