Kenji Sugimoto

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Developing apparatus and developing method
- Patent number 9,195,140
- Issue date Nov 24, 2015
- SCREEN Holdings Co., Ltd.
- Tsuyoshi Mitsuhashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing apparatus and developing method
- Patent number 7,922,405
- Issue date Apr 12, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Tsuyoshi Mitsuhashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 7,364,376
- Issue date Apr 29, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method and apparatus
- Patent number 7,105,074
- Issue date Sep 12, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Osamu Tamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus control system and substrate process...
- Patent number 6,963,789
- Issue date Nov 8, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Tamihiro Bun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 6,893,171
- Issue date May 17, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Yoshiteru Fukutomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and method
- Patent number 6,832,863
- Issue date Dec 21, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 6,558,053
- Issue date May 6, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Kazuhito Shigemori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate developing method and apparatus
- Patent number 6,000,862
- Issue date Dec 14, 1999
- Dainippon Screen Mfg. Co. Ltd.
- Seiichiro Okuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate transfer and bath apparatus
- Patent number 5,976,198
- Issue date Nov 2, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Tadahiro Suhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and air supply method in substrate p...
- Patent number 5,792,259
- Issue date Aug 11, 1998
- Dainippon Screen Mfg. Co., Ltd.
- Katsushi Yoshioka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate spin treating method and apparatus
- Patent number 5,788,773
- Issue date Aug 4, 1998
- Dainippon Screen Mfg. Co., Ltd.
- Seiichiro Okuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate spin coating apparatus
- Patent number 5,762,709
- Issue date Jun 9, 1998
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate spin treating method and apparatus
- Patent number 5,677,000
- Issue date Oct 14, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Katsushi Yoshioka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for drying a substrate having a resist film wi...
- Patent number 5,678,116
- Issue date Oct 14, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for dipping substrates in processing fluid
- Patent number 5,656,088
- Issue date Aug 12, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for cleaning substrates and methods for attaching/detachi...
- Patent number 5,647,083
- Issue date Jul 15, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- B08 - CLEANING
Information Patent Grant
Processing apparatus having parts for thermal and non-thermal treat...
- Patent number 5,639,301
- Issue date Jun 17, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Shigeru Sasada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing method and apparatus
- Patent number 5,555,234
- Issue date Sep 10, 1996
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dipping type surface treatment apparatus
- Patent number 5,191,908
- Issue date Mar 9, 1993
- Dainippon Screen Mfg. Co., Ltd.
- Toshio Hiroe
- B08 - CLEANING
Information Patent Grant
Apparatus for applying liquid agent on surface of rotating substrate
- Patent number 5,180,431
- Issue date Jan 19, 1993
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotary wafer drier
- Patent number 4,987,687
- Issue date Jan 29, 1991
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- F26 - DRYING
Information Patent Grant
Apparatus for treating the surfaces of wafers
- Patent number 4,870,923
- Issue date Oct 3, 1989
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEVELOPING APPARATUS AND DEVELOPING METHOD
- Publication number 20110170855
- Publication date Jul 14, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Tsuyoshi MITSUHASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS AND DEVELOPING METHOD
- Publication number 20070183775
- Publication date Aug 9, 2007
- Tsuyoshi Mitsuhashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060024446
- Publication date Feb 2, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20040229441
- Publication date Nov 18, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating apparatus and method
- Publication number 20040005149
- Publication date Jan 8, 2004
- Dainippon Screen Mfg. Co.,Ltd.
- Kenji Sugimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate treating apparatus
- Publication number 20030213431
- Publication date Nov 20, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Yoshiteru Fukutomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus control system and substrate process...
- Publication number 20030060917
- Publication date Mar 27, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Tamihiro Bun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating method and apparatus
- Publication number 20030017665
- Publication date Jan 23, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Osamu Tamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20020152958
- Publication date Oct 24, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Kazuhito Shigemori
- H01 - BASIC ELECTRIC ELEMENTS

Kenji Sugimoto

Person

Patents Grantslast 30 patents

Developing apparatus and developing method

Developing apparatus and developing method

Substrate processing apparatus

Substrate treating method and apparatus

Substrate processing apparatus control system and substrate process...

Substrate treating apparatus

Substrate treating apparatus and method

Substrate processing apparatus

Substrate developing method and apparatus

Substrate transfer and bath apparatus

Substrate processing apparatus and air supply method in substrate p...

Substrate spin treating method and apparatus

Substrate spin coating apparatus

Substrate spin treating method and apparatus

Method and apparatus for drying a substrate having a resist film wi...

Apparatus for dipping substrates in processing fluid

Apparatus for cleaning substrates and methods for attaching/detachi...

Processing apparatus having parts for thermal and non-thermal treat...

Developing method and apparatus

Dipping type surface treatment apparatus

Apparatus for applying liquid agent on surface of rotating substrate

Rotary wafer drier

Apparatus for treating the surfaces of wafers

Patents Applicationslast 30 patents

DEVELOPING APPARATUS AND DEVELOPING METHOD

DEVELOPING APPARATUS AND DEVELOPING METHOD

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Substrate treating apparatus and method

Substrate treating apparatus

Substrate processing apparatus control system and substrate process...

Substrate treating method and apparatus

Substrate processing apparatus