Kenji Sugishima

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for self-learning and self-improving a semicon...
- Patent number 9,424,528
- Issue date Aug 23, 2016
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Autonomous biologically based learning tool
- Patent number 9,275,335
- Issue date Mar 1, 2016
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Tool performance by linking spectroscopic information with tool ope...
- Patent number 8,954,184
- Issue date Feb 10, 2015
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for self-learning and self-improving a semicon...
- Patent number 8,744,607
- Issue date Jun 3, 2014
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system for detection of tool performance degradation and...
- Patent number 8,725,667
- Issue date May 13, 2014
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Biologically based chamber matching
- Patent number 8,723,869
- Issue date May 13, 2014
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for self-learning and self-improving a semicon...
- Patent number 8,396,582
- Issue date Mar 12, 2013
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Autonomous biologically based learning tool
- Patent number 8,190,543
- Issue date May 29, 2012
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Autonomous adaptive system and method for improving semiconductor m...
- Patent number 8,078,552
- Issue date Dec 13, 2011
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of monitoring a semiconductor processing system using a wire...
- Patent number 8,026,113
- Issue date Sep 27, 2011
- Tokyo Electron Limited
- Sanjeev Kaushal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for monolayer deposition (MLD)
- Patent number 7,838,072
- Issue date Nov 23, 2010
- Tokyo Electron Limited
- Sanjeev Kaushal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of correcting systematic error in a metrology system
- Patent number 7,710,565
- Issue date May 4, 2010
- Tokyo Electron Limited
- Sanjeev Kaushal
- G01 - MEASURING TESTING
Information Patent Grant
Optical measurement system with systematic error correction
- Patent number 7,561,269
- Issue date Jul 14, 2009
- Tokyo Electron Limited
- Sanjeev Kaushal
- G01 - MEASURING TESTING
Information Patent Grant
Method for creating a built-in self test (BIST) table for monitorin...
- Patent number 7,526,699
- Issue date Apr 28, 2009
- Tokyo Electron Limited
- Sanjeev Kaushal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monitoring a monolayer deposition (MLD) system using a built-in sel...
- Patent number 7,519,885
- Issue date Apr 14, 2009
- Tokyo Electron Limited
- Sanjeev Kaushal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for monolayer deposition
- Patent number 7,459,175
- Issue date Dec 2, 2008
- Tokyo Electron Limited
- Sanjeev Kaushal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer curvature estimation, monitoring, and compensation
- Patent number 7,452,793
- Issue date Nov 18, 2008
- Tokyo Electron Limited
- Sanjeev Kaushal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Built-in self test for a thermal processing system
- Patent number 7,444,572
- Issue date Oct 28, 2008
- Tokyo Electron Limited
- Sanjeev Kaushal
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Monitoring a thermal processing system
- Patent number 7,406,644
- Issue date Jul 29, 2008
- Tokyo Electron Limited
- Sanjeev Kaushal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spintronic transistor
- Patent number 7,342,244
- Issue date Mar 11, 2008
- Tokyo Electron Limited
- Sanjeev Kaushal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monitoring a single-wafer processing system
- Patent number 7,340,377
- Issue date Mar 4, 2008
- Tokyo Electron Limited
- Sanjeev Kaushal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monitoring a system during low-pressure processes
- Patent number 7,302,363
- Issue date Nov 27, 2007
- Tokyo Electron Limited
- Sanjeev Kaushal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Built-in self test for a thermal processing system
- Patent number 7,165,011
- Issue date Jan 16, 2007
- Tokyo Electron Limited
- Sanjeev Kaushal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for adaptive real time control of a thermal processing system
- Patent number 7,101,816
- Issue date Sep 5, 2006
- Tokyo Electron Limited
- Sanjeev Kaushal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adaptive real time control of a reticle/mask system
- Patent number 7,025,280
- Issue date Apr 11, 2006
- Tokyo Electron Limited
- Sanjeev Kaushal
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BIOLOGICALLY BASED CHAMBER MATCHING
- Publication number 20140304196
- Publication date Oct 9, 2014
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICON...
- Publication number 20140229409
- Publication date Aug 14, 2014
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICON...
- Publication number 20130151447
- Publication date Jun 13, 2013
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
BIOLOGICALLY BASED CHAMBER MATCHING
- Publication number 20120242667
- Publication date Sep 27, 2012
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTONOMOUS BIOLOGICALLY BASED LEARNING TOOL
- Publication number 20120209798
- Publication date Aug 16, 2012
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TOOL PERFORMANCE BY LINKING SPECTROSCOPIC INFORMATION WITH TOOL OPE...
- Publication number 20120185813
- Publication date Jul 19, 2012
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTONOMOUS BIOLOGICALLY BASED LEARNING TOOL
- Publication number 20110131162
- Publication date Jun 2, 2011
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICON...
- Publication number 20100138026
- Publication date Jun 3, 2010
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR DETECTION OF TOOL PERFORMANCE DEGRADATION AND...
- Publication number 20090240366
- Publication date Sep 24, 2009
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTONOMOUS ADAPTIVE SEMICONDUCTOR MANUFACTURING
- Publication number 20090228408
- Publication date Sep 10, 2009
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL MEASUREMENT SYSTEM WITH SYSTEMATIC ERROR CORRECTION
- Publication number 20090153842
- Publication date Jun 18, 2009
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF CORRECTING SYSTEMATIC ERROR IN A METROLOGY SYSTEM
- Publication number 20090157343
- Publication date Jun 18, 2009
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G01 - MEASURING TESTING
Information Patent Application
SPINTRONIC TRANSISTOR
- Publication number 20080017843
- Publication date Jan 24, 2008
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CREATING A BUILT-IN SELF TEST (BIST) TABLE FOR MONITORIN...
- Publication number 20070259285
- Publication date Nov 8, 2007
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONITORING A THERMAL PROCESSING SYSTEM
- Publication number 20070255991
- Publication date Nov 1, 2007
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONITORING A SYSTEM DURING LOW-PRESSURE PROCESSES
- Publication number 20070239375
- Publication date Oct 11, 2007
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONITORING A MONOLAYER DEPOSITION (MLD) SYSTEM USING A BUILT-IN SEL...
- Publication number 20070234953
- Publication date Oct 11, 2007
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONITORING A SINGLE-WAFER PROCESSING SYSTEM
- Publication number 20070233427
- Publication date Oct 4, 2007
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MONITORING A SEMICONDUCTOR PROCESSING SYSTEM USING A WIRE...
- Publication number 20070224712
- Publication date Sep 27, 2007
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM WITH WIRELESS SENSOR NETWORK MONITO...
- Publication number 20070221125
- Publication date Sep 27, 2007
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Built-in self test for a thermal processing system
- Publication number 20070061652
- Publication date Mar 15, 2007
- Tokyo Electron Limited, TBS Broadcast Center
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Application
Wafer curvature estimation, monitoring, and compensation
- Publication number 20060241891
- Publication date Oct 26, 2006
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for monolayer deposition
- Publication number 20060166501
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for monolayer deposition (MLD)
- Publication number 20060165890
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Adaptive real time control of a reticle/mask system
- Publication number 20050167514
- Publication date Aug 4, 2005
- Sanjeev Kaushal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods for adaptive real time control of a thermal processing system
- Publication number 20050149886
- Publication date Jul 7, 2005
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- H01 - BASIC ELECTRIC ELEMENTS

Kenji Sugishima

Person

Patents Grantslast 30 patents

Method and apparatus for self-learning and self-improving a semicon...

Autonomous biologically based learning tool

Tool performance by linking spectroscopic information with tool ope...

Method and apparatus for self-learning and self-improving a semicon...

Method and system for detection of tool performance degradation and...

Biologically based chamber matching

Method and apparatus for self-learning and self-improving a semicon...

Autonomous biologically based learning tool

Autonomous adaptive system and method for improving semiconductor m...

Method of monitoring a semiconductor processing system using a wire...

Method and apparatus for monolayer deposition (MLD)

Method of correcting systematic error in a metrology system

Optical measurement system with systematic error correction

Method for creating a built-in self test (BIST) table for monitorin...

Monitoring a monolayer deposition (MLD) system using a built-in sel...

Method for monolayer deposition

Wafer curvature estimation, monitoring, and compensation

Built-in self test for a thermal processing system

Monitoring a thermal processing system

Spintronic transistor

Monitoring a single-wafer processing system

Monitoring a system during low-pressure processes

Built-in self test for a thermal processing system

Methods for adaptive real time control of a thermal processing system

Adaptive real time control of a reticle/mask system

Patents Applicationslast 30 patents

BIOLOGICALLY BASED CHAMBER MATCHING

METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICON...

METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICON...

BIOLOGICALLY BASED CHAMBER MATCHING

AUTONOMOUS BIOLOGICALLY BASED LEARNING TOOL

TOOL PERFORMANCE BY LINKING SPECTROSCOPIC INFORMATION WITH TOOL OPE...

AUTONOMOUS BIOLOGICALLY BASED LEARNING TOOL

METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICON...

METHOD AND SYSTEM FOR DETECTION OF TOOL PERFORMANCE DEGRADATION AND...

AUTONOMOUS ADAPTIVE SEMICONDUCTOR MANUFACTURING

OPTICAL MEASUREMENT SYSTEM WITH SYSTEMATIC ERROR CORRECTION

METHOD OF CORRECTING SYSTEMATIC ERROR IN A METROLOGY SYSTEM

SPINTRONIC TRANSISTOR

METHOD FOR CREATING A BUILT-IN SELF TEST (BIST) TABLE FOR MONITORIN...

MONITORING A THERMAL PROCESSING SYSTEM

MONITORING A SYSTEM DURING LOW-PRESSURE PROCESSES

MONITORING A MONOLAYER DEPOSITION (MLD) SYSTEM USING A BUILT-IN SEL...

MONITORING A SINGLE-WAFER PROCESSING SYSTEM

METHOD OF MONITORING A SEMICONDUCTOR PROCESSING SYSTEM USING A WIRE...

SEMICONDUCTOR PROCESSING SYSTEM WITH WIRELESS SENSOR NETWORK MONITO...

Built-in self test for a thermal processing system

Wafer curvature estimation, monitoring, and compensation

Method and apparatus for monolayer deposition

Method and apparatus for monolayer deposition (MLD)

Adaptive real time control of a reticle/mask system

Methods for adaptive real time control of a thermal processing system