Kenji Tago

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Shiroyama-Machi, Kanagawa-Ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Thin film forming apparatus cleaning method
- Patent number 6,925,731
- Issue date Aug 9, 2005
- Tokyo Electron Limited
- Kazuaki Nishimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CLEANING THIN FILM FORMING APPARATUS, THIN FILM FORMING...
- Publication number 20120247511
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Mitsuhiro OKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thin film forming apparatus cleaning method
- Publication number 20050090123
- Publication date Apr 28, 2005
- Kazuaki Nishimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...