TREA

Kenji TAGO

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  • Nirasaki City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method and apparatus for forming silicon oxide film
    • Patent number 7,700,156
    • Issue date Apr 20, 2010
    • Tokyo Electron Limited
    • Kimiya Aoki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer boat and film formation method
    • Patent number 6,344,387
    • Issue date Feb 5, 2002
    • Tokyo Electron Limited
    • Kazuhide Hasebe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer boat and film formation method
    • Patent number 6,156,121
    • Issue date Dec 5, 2000
    • Tokyo Electron Limited
    • Kazuhide Hasebe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Heat treatment apparatus
    • Patent number 5,556,275
    • Issue date Sep 17, 1996
    • Tokyo Electron Limited
    • Kazunari Sakata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Processing apparatus
    • Patent number 5,536,320
    • Issue date Jul 16, 1996
    • Tokyo Electron Kabushiki Kaisha
    • Harunori Ushikawa
    • C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents