Kenji TSUTSUMI

Person

Koshi-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate treatment method, coating treatment apparatus, and substr...
- Patent number 8,703,400
- Issue date Apr 22, 2014
- Tokyo Electron Limited
- Kenji Tsutsumi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate treatment method, coating film removing apparatus, and su...
- Patent number 8,366,872
- Issue date Feb 5, 2013
- Tokyo Electron Limited
- Kenji Tsutsumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method, substrate processing system, and compu...
- Patent number 8,083,959
- Issue date Dec 27, 2011
- Tokyo Electron Limited
- Hideharu Kyouda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming apparatus and method
- Patent number 7,959,988
- Issue date Jun 14, 2011
- Tokyo Electron Limited
- Taro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method, coating treatment apparatus, and substr...
- Patent number 7,926,441
- Issue date Apr 19, 2011
- Tokyo Electron Limited
- Kenji Tsutsumi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND COMPU...
- Publication number 20120061021
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Hideharu KYOUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COATING FILM REMOVING APPARATUS, AND SU...
- Publication number 20110240597
- Publication date Oct 6, 2011
- TOKYO ELECTRON LIMITED
- Kenji TSUTSUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT METHOD, COATING TREATMENT APPARATUS, AND SUBSTR...
- Publication number 20110155693
- Publication date Jun 30, 2011
- TOKYO ELECTRON LIMITED
- Kenji TSUTSUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COATING TREATMENT APPARATUS, AND SUBSTR...
- Publication number 20080176003
- Publication date Jul 24, 2008
- TOKYO ELECTRON LIMITED
- Kenji TSUTSUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COATING FILM REMOVING APPARATUS, AND SU...
- Publication number 20080176002
- Publication date Jul 24, 2008
- TOKYO ELECTRON LIMITED
- Kenji TSUTSUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND COMPU...
- Publication number 20080160781
- Publication date Jul 3, 2008
- TOKYO ELECTRON LIMITED
- Hideharu KYOUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING FILM FORMING APPARATUS AND METHOD
- Publication number 20080124489
- Publication date May 29, 2008
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS

Kenji TSUTSUMI

Person

Patents Grantslast 30 patents

Substrate treatment method, coating treatment apparatus, and substr...

Substrate treatment method, coating film removing apparatus, and su...

Substrate processing method, substrate processing system, and compu...

Coating film forming apparatus and method

Substrate treatment method, coating treatment apparatus, and substr...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND COMPU...

SUBSTRATE TREATMENT METHOD, COATING FILM REMOVING APPARATUS, AND SU...

SUBSTRATE TREATMENT METHOD, COATING TREATMENT APPARATUS, AND SUBSTR...

SUBSTRATE TREATMENT METHOD, COATING TREATMENT APPARATUS, AND SUBSTR...

SUBSTRATE TREATMENT METHOD, COATING FILM REMOVING APPARATUS, AND SU...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND COMPU...

COATING FILM FORMING APPARATUS AND METHOD