Kenji Urata

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Kumamoto-Ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid processing method and liquid processing apparatus
- Patent number 7,640,885
- Issue date Jan 5, 2010
- Tokyo Electron Limited
- Tsunenaga Nakashima
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
Liquid processing method and liquid processing apparatus
- Publication number 20070245953
- Publication date Oct 25, 2007
- Tsunenaga Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing method and liquid processing apparatus
- Publication number 20060233952
- Publication date Oct 19, 2006
- TOKYO ELECTRON LIMITED
- Tsunenaga Nakashima
- H01 - BASIC ELECTRIC ELEMENTS