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Koshi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Nozzle, substrate processing apparatus, and substrate processing me...
Patent number
12,007,692
Issue date
Jun 11, 2024
Tokyo Electron Limited
Hiroki Sakurai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Solution treatment apparatus and cleaning method
Patent number
11,868,057
Issue date
Jan 9, 2024
Tokyo Electron Limited
Kenta Shibasaki
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus
Patent number
11,273,464
Issue date
Mar 15, 2022
Tokyo Electron Limited
Satoshi Shimmura
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Polishing cleaning mechanism, substrate processing apparatus, and s...
Patent number
10,328,546
Issue date
Jun 25, 2019
Tokyo Electron Limited
Akihiro Kubo
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing cleaning mechanism, substrate processing apparatus, and s...
Patent number
9,669,510
Issue date
Jun 6, 2017
Tokyo Electron Limited
Akihiro Kubo
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
CUP, LIQUID PROCESSING APPARATUS, AND LIQUID PROCESSING METHOD
Publication number
20240226954
Publication date
Jul 11, 2024
TOKYO ELECTRON LIMITED
Ryunosuke Higashi
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
CUP, LIQUID PROCESSING APPARATUS, AND LIQUID PROCESSING METHOD
Publication number
20240131554
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Ryunosuke Higashi
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD
Publication number
20240085813
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Kenta SHIBASAKI
B08 - CLEANING
Information
Patent Application
NOZZLE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING ME...
Publication number
20230185199
Publication date
Jun 15, 2023
TOKYO ELECTRON LIMITED
Hiroki SAKURAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD
Publication number
20220113643
Publication date
Apr 14, 2022
TOKYO ELECTRON LIMITED
Kenta SHIBASAKI
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20210039131
Publication date
Feb 11, 2021
TOKYO ELECTRON LIMITED
Satoshi Shimmura
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
Polishing Cleaning Mechanism, Substrate Processing Apparatus, and S...
Publication number
20150133032
Publication date
May 14, 2015
TOKYO ELECTRON LIMITED
Akihiro KUBO
H01 - BASIC ELECTRIC ELEMENTS