Kenji Yaegashi

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 11,673,313
- Issue date Jun 13, 2023
- Canon Kabushiki Kaisha
- Kenji Yaegashi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Measurement device, imprint apparatus, method for manufacturing pro...
- Patent number 11,181,363
- Issue date Nov 23, 2021
- Canon Kabushiki Kaisha
- Kenji Yaegashi
- G01 - MEASURING TESTING
Information Patent Grant
Detection apparatus, imprint apparatus, and method of manufacturing...
- Patent number 9,927,701
- Issue date Mar 27, 2018
- Canon Kabushiki Kaisha
- Tooru Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND ARTICLE MANUFACTURING METHOD
- Publication number 20240393683
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- KENJI YAEGASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT ALIGNMENT METHOD, IMPRINT METHOD, ARTICLE MANUFACTURING METH...
- Publication number 20230294351
- Publication date Sep 21, 2023
- Canon Kabushiki Kaisha
- KENJI YAEGASHI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20200376739
- Publication date Dec 3, 2020
- Canon Kabushiki Kaisha
- Kenji Yaegashi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MEASUREMENT DEVICE, IMPRINT APPARATUS, METHOD FOR MANUFACTURING PRO...
- Publication number 20170307367
- Publication date Oct 26, 2017
- Canon Kabushiki Kaisha
- Kenji Yaegashi
- G02 - OPTICS
Information Patent Application
DETECTION APPARATUS, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20150146207
- Publication date May 28, 2015
- Canon Kabushiki Kaisha
- Tooru KAWASHIMA
- G01 - MEASURING TESTING
Information Patent Application
TRANSFER APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130285270
- Publication date Oct 31, 2013
- Canon Kabushiki Kaisha
- Kenji Yaegashi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Kenji Yaegashi

Person

Patents Grantslast 30 patents

Imprint apparatus and article manufacturing method

Measurement device, imprint apparatus, method for manufacturing pro...

Detection apparatus, imprint apparatus, and method of manufacturing...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM AND ARTICLE MANUFACTURING METHOD

OBJECT ALIGNMENT METHOD, IMPRINT METHOD, ARTICLE MANUFACTURING METH...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

MEASUREMENT DEVICE, IMPRINT APPARATUS, METHOD FOR MANUFACTURING PRO...

DETECTION APPARATUS, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING...

TRANSFER APPARATUS AND METHOD OF MANUFACTURING ARTICLE