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Kenji Yamamoto

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  • Nirasaki-Shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Silicon etching method
    • Patent number 7,109,123
    • Issue date Sep 19, 2006
    • Tokyo Electron Limited
    • Takanori Mimura
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Etching method and plasma etching processing apparatus
    • Publication number 20050014372
    • Publication date Jan 20, 2005
    • Satoshi Shimonishi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing method
    • Publication number 20040222190
    • Publication date Nov 11, 2004
    • TOKYO ELECTRON LIMITED
    • Katsumi Horiguchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Silicon etching method
    • Publication number 20040097090
    • Publication date May 20, 2004
    • Takanori Mimura
    • H01 - BASIC ELECTRIC ELEMENTS