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Kenji Yamamoto
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Information processing apparatus, storage medium, lithography appar...
Patent number
11,131,935
Issue date
Sep 28, 2021
Canon Kabushiki Kaisha
Kenji Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing system, method of controlling substrate proces...
Patent number
10,892,178
Issue date
Jan 12, 2021
Canon Kabushiki Kaisha
Mitsuhiro Masuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imprint apparatus, and method of manufacturing article
Patent number
10,372,033
Issue date
Aug 6, 2019
Canon Kabushiki Kaisha
Kenji Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint apparatus, imprint method, and method of manufacturing article
Patent number
9,971,256
Issue date
May 15, 2018
Canon Kabushiki Kaisha
Kenji Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
INFORMATION PROCESSING APPARATUS, STORAGE MEDIUM, LITHOGRAPHY APPAR...
Publication number
20200264513
Publication date
Aug 20, 2020
Canon Kabushiki Kaisha
Kenji Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, METHOD OF CONTROLLING SUBSTRATE PROCES...
Publication number
20190371637
Publication date
Dec 5, 2019
Canon Kabushiki Kaisha
Mitsuhiro Masuda
G05 - CONTROLLING REGULATING
Information
Patent Application
IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20160016353
Publication date
Jan 21, 2016
Canon Kabushiki Kaisha
Kenji Yamamoto
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL