Kenji Yokomizo

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Onojo, JP

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Patents Grantslast 30 patents

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Substrate drying apparatus and substrate drying method
- Patent number 5,671,544
- Issue date Sep 30, 1997
- Tokyo Electron Limited
- Kenji Yokomizo
- F26 - DRYING
Information Patent Grant
Substrate drying apparatus and substrate drying method
- Patent number 5,575,079
- Issue date Nov 19, 1996
- Tokyo Electron Limited
- Kenji Yokomizo
- F26 - DRYING
Information Patent Grant
Substrates-washing apparatus
- Patent number 5,503,171
- Issue date Apr 2, 1996
- Tokyo Electron Limited
- Kenji Yokomizo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spindrier
- Patent number 5,435,075
- Issue date Jul 25, 1995
- Tokyo Electron Limited
- Hirofumi Shiraishi
- F26 - DRYING
Information Patent Grant
Processing vessel for a wafer washing system
- Patent number 5,327,921
- Issue date Jul 12, 1994
- Tokyo Electron Limited
- Shouri Mokuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transportation-transfer device for an object of treatment
- Patent number 5,297,910
- Issue date Mar 29, 1994
- Tokyo Electron Limited
- Kazutoshi Yoshioka
- H01 - BASIC ELECTRIC ELEMENTS