Kenjiro Haraki

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Tokyo-To, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vertical heat treatment apparatus and method for operating the same
- Patent number 8,177,550
- Issue date May 15, 2012
- Tokyo Electron Limited
- Kenjiro Haraki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Vertical heat treatment apparatus and method for operating the same
- Publication number 20090053665
- Publication date Feb 26, 2009
- Kenjiro Haraki
- H01 - BASIC ELECTRIC ELEMENTS