Kenjiro Kokubu

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Chigasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film deposition apparatus and film deposition method
- Patent number 9,310,524
- Issue date Apr 12, 2016
- ULVAC, Inc.
- Haruhiko Yamamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
Film Deposition Apparatus and Film Deposition Method
- Publication number 20140295104
- Publication date Oct 2, 2014
- Haruhiko Yamamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20110014398
- Publication date Jan 20, 2011
- ULVAC, Inc.
- Haruhiko Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATION SOURCE AND FILM-FORMING DEVICE
- Publication number 20100313811
- Publication date Dec 16, 2010
- ULVAC INC.
- Haruhiko Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...