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Kenlin Chenjin Huang
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Milpitas, CA, US
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last 30 patents
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Patent Grant
Method for reducing topography dependent charging effects in a plas...
Patent number
6,635,577
Issue date
Oct 21, 2003
Applied Materials, Inc.
John M. Yamartino
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Multi-step metallization etch
Patent number
5,827,437
Issue date
Oct 27, 1998
Lam Research Corporation
Richard Yen-chang Yang
H01 - BASIC ELECTRIC ELEMENTS