Kennan Mo

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Flow rate control method, flow rate control device, and film formin...
- Patent number 11,753,719
- Issue date Sep 12, 2023
- Tokyo Electron Limited
- Kennan Mo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate
- Patent number 11,236,425
- Issue date Feb 1, 2022
- Tokyo Electron Limited
- Kennan Mo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FLOW RATE CONTROL METHOD, FLOW RATE CONTROL DEVICE, AND FILM FORMIN...
- Publication number 20190284698
- Publication date Sep 19, 2019
- TOKYO ELECTRON LIMITED
- Kennan MO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, STORAGE MEDIUM, AND RAW MATERIAL GA...
- Publication number 20190177849
- Publication date Jun 13, 2019
- TOKYO ELECTRON LIMITED
- Kennan MO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY APPARATUS AND FILM FORMING APPARATUS
- Publication number 20190078207
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Hironori Yagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...