Kennet Baylon

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Chamber component cleanliness measurement system
- Patent number 12,072,318
- Issue date Aug 27, 2024
- Lam Research Corporation
- Amir A. Yasseri
- B08 - CLEANING
Information Patent Grant
Electrostatic chuck cleaning fixture
- Patent number 10,391,526
- Issue date Aug 27, 2019
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Wet clean process for cleaning plasma processing chamber components
- Patent number 9,406,534
- Issue date Aug 2, 2016
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER COMPONENT CLEANLINESS MEASUREMENT SYSTEM
- Publication number 20220252548
- Publication date Aug 11, 2022
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- B08 - CLEANING
Information Patent Application
Wet Clean Process for Cleaning Plasma Processing Chamber Components
- Publication number 20160079096
- Publication date Mar 17, 2016
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
ELECTROSTATIC CHUCK CLEANING FIXTURE
- Publication number 20150165492
- Publication date Jun 18, 2015
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING