Kenneth C. Dodge

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Palo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Substrate proximity drying using in-situ local heating of substrate
- Patent number 8,011,116
- Issue date Sep 6, 2011
- Lam Research Corporation
- Katrina Mikhaylichenko
- B08 - CLEANING
Information Patent Grant
Substrate proximity drying using in-situ local heating of substrate...
- Patent number 7,806,126
- Issue date Oct 5, 2010
- Lam Research Corporation
- Katrina Mikhaylichenko
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROXIMITY DRYING USING IN-SITU LOCAL HEATING OF SUBSTRATE
- Publication number 20100313443
- Publication date Dec 16, 2010
- Katrina Mikhaylichenko
- B08 - CLEANING