Kenneth C. McMahon

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Morgan Hill, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Wafer drying apparatus and method
- Patent number 6,615,510
- Issue date Sep 9, 2003
- Lam Research Corporation
- Oliver David Jones
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for drying batches of disks
- Patent number 6,477,786
- Issue date Nov 12, 2002
- Lam Research Corporation
- Oliver David Jones
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Disk drying apparatus and method
- Patent number 6,446,355
- Issue date Sep 10, 2002
- Lam Research Corporation
- Oliver David Jones
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for drying batches of wafers
- Patent number 6,430,841
- Issue date Aug 13, 2002
- Lam Research Corporation
- Jonathan Borkowski
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Wafer drying apparatus and method
- Publication number 20030000102
- Publication date Jan 2, 2003
- Lam Research Corporation
- Oliver David Jones
- H01 - BASIC ELECTRIC ELEMENTS