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Kenneth C. Struven
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Megasonic bath
Patent number
6,523,557
Issue date
Feb 25, 2003
Imtec Acculine, Inc.
Kenneth C. Struven
B08 - CLEANING
Information
Patent Grant
Substrate cassette for ultrasonic cleaning
Patent number
6,209,555
Issue date
Apr 3, 2001
Imtec Acculine, Inc.
Kenneth C. Struven
B08 - CLEANING
Information
Patent Grant
Apparatus and method for protecting chemical bath seals
Patent number
5,383,488
Issue date
Jan 24, 1995
Imtec Products, Inc.
Kenneth C. Struven
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer polisher head having floating retainer ring
Patent number
5,205,082
Issue date
Apr 27, 1993
Cybeq Systems, Inc.
Norm Shendon
B24 - GRINDING POLISHING
Information
Patent Grant
Floating subcarriers for wafer polishing apparatus
Patent number
4,918,870
Issue date
Apr 24, 1990
Siltec Corporation
Walter Torbert
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Method and apparatus for damage-free, single wafer, sonic boundary...
Publication number
20080029125
Publication date
Feb 7, 2008
Imtec Acculine, Inc.
Michael B. Olesen
B08 - CLEANING
Information
Patent Application
Heated single wafer megasonic processing plate
Publication number
20070215173
Publication date
Sep 20, 2007
Paul V. Mendes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Uniform, far-field megasonic cleaning method and apparatus
Publication number
20070006892
Publication date
Jan 11, 2007
Imtec Acculine, Inc.
Michael B. Olesen
B08 - CLEANING
Information
Patent Application
Megasonic cleaning with obliquely aligned transducer
Publication number
20050252522
Publication date
Nov 17, 2005
Kenneth C. Struven
B08 - CLEANING
Information
Patent Application
Megasonic bath
Publication number
20020069895
Publication date
Jun 13, 2002
Kenneth C. Struven
H01 - BASIC ELECTRIC ELEMENTS