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Kenneth J. Bahng
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Cupertino, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for efficient removal of halogen residues from etched sub...
Patent number
8,293,016
Issue date
Oct 23, 2012
Applied Materials, Inc.
Kenneth J. Bahng
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Substrate temperature measurement by infrared transmission
Patent number
7,946,759
Issue date
May 24, 2011
Applied Materials, Inc.
Matthew Fenton Davis
G01 - MEASURING TESTING
Information
Patent Grant
Integrated method for removal of halogen residues from etched subst...
Patent number
7,846,845
Issue date
Dec 7, 2010
Applied Materials, Inc.
Kenneth J. Bahng
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method and apparatus for cooling wafers
Patent number
5,199,483
Issue date
Apr 6, 1993
Applied Materials, Inc.
Kenneth J. Bahng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS FOR EFFICIENT REMOVAL OF HALOGEN RESIDUES FROM ETCHED SUB...
Publication number
20100133255
Publication date
Jun 3, 2010
Applied Materials, Inc.
Kenneth J. Bahng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TEMPERATURE MEASUREMENT BY INFRARED TRANSMISSION
Publication number
20080198895
Publication date
Aug 21, 2008
MATTHEW FENTON DAVIS
G01 - MEASURING TESTING
Information
Patent Application
INTEGRATED METHOD FOR REMOVAL OF HALOGEN RESIDUES FROM ETCHED SUBST...
Publication number
20080099040
Publication date
May 1, 2008
Kenneth J. Bahng
H01 - BASIC ELECTRIC ELEMENTS