Kenneth J. Bhang

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Cupertino, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for efficient removal of halogen residues from etched sub...
- Patent number 8,486,194
- Issue date Jul 16, 2013
- Applied Materials, Inc.
- Kenneth J. Bhang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR EFFICIENT REMOVAL OF HALOGEN RESIDUES FROM ETCHED SUB...
- Publication number 20130040080
- Publication date Feb 14, 2013
- Kenneth J. Bhang
- H01 - BASIC ELECTRIC ELEMENTS