Kenneth J. Harte

Person

Carlisle, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for processing substrate edges
- Patent number 8,658,937
- Issue date Feb 25, 2014
- UVTech Systems, Inc.
- Kenneth J. Harte
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Fiber-optic beam delivery system for wafer edge processing
- Patent number 8,415,587
- Issue date Apr 9, 2013
- UVTech Systems, Inc.
- Ronald P. Millman
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for processing substrate edges
- Patent number 8,410,394
- Issue date Apr 2, 2013
- UVTech Systems, Inc.
- Ronald P. Millman
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Orthogonal beam delivery system for wafer edge processing
- Patent number 8,183,500
- Issue date May 22, 2012
- UVTech Systems, Inc.
- Kenneth J. Harte
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Scanning plasma reactor
- Patent number 7,270,724
- Issue date Sep 18, 2007
- UVTech Systems, Inc.
- David J. Elliott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shaped biocompatible radiation shield and method for making same
- Patent number 7,109,505
- Issue date Sep 19, 2006
- Carl Zeiss AG
- Alan P. Sliski
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Apparatus for local radiation therapy
- Patent number 6,421,416
- Issue date Jul 16, 2002
- Photoelectron Corporation
- Alan P. Sliski
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Support system for a radiation treatment apparatus
- Patent number 6,302,581
- Issue date Oct 16, 2001
- Photoelectron Corporation
- Alan P. Sliski
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Apparatus for local radiation therapy
- Patent number 6,301,328
- Issue date Oct 9, 2001
- Photoelectron Corporation
- Alan P. Sliski
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Apparatus for local radiation therapy
- Patent number 6,285,735
- Issue date Sep 4, 2001
- Photoelectron Corporation
- Alan P. Sliski
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
X-ray apparatus for applying a predetermined flux to an interior su...
- Patent number 5,621,780
- Issue date Apr 15, 1997
- Photoelectron Corporation
- Donald O. Smith
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Apparatus for applying a predetermined x-radiation flux to an inter...
- Patent number 5,566,221
- Issue date Oct 15, 1996
- Photoelectron Corporation
- Donald O. Smith
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Optical beam homogenizing apparatus and method
- Patent number 5,548,444
- Issue date Aug 20, 1996
- Hughes Danbury Optical Systems, Inc.
- Joseph L. McLaughlin
- G02 - OPTICS
Information Patent Grant
Method for treating brain tumors
- Patent number 5,452,720
- Issue date Sep 26, 1995
- Photoelectron Corporation
- Donald O. Smith
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
X-ray source with flexible probe
- Patent number 5,428,658
- Issue date Jun 27, 1995
- Photoelectron Corporation
- Peter E. Oettinger
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
X-ray source with shaped radiation pattern
- Patent number 5,422,926
- Issue date Jun 6, 1995
- Photoelectron Corporation
- Donald O. Smith
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Switched electron beam source employing a common photo-emitter cath...
- Patent number 5,039,862
- Issue date Aug 13, 1991
- Donald O. Smith
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam source employing a photo-emitter cathode
- Patent number 4,820,927
- Issue date Apr 11, 1989
- Control Data Corporation
- Guenther O. Langner
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Height measurement and correction method for electron beam lithogra...
- Patent number 4,728,799
- Issue date Mar 1, 1988
- Control Data Corporation
- James J. Gordon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multiple channel electron beam optical column lithography system an...
- Patent number 4,694,178
- Issue date Sep 15, 1987
- Control Data Corporation
- Kenneth J. Harte
- B82 - NANO-TECHNOLOGY
Information Patent Grant
All electrostatic electron optical sub-system for variable electron...
- Patent number 4,683,366
- Issue date Jul 28, 1987
- Control Data Corporation
- Kenneth J. Harte
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for measurement of spotsize and edgewidth in electron beam l...
- Patent number 4,675,528
- Issue date Jun 23, 1987
- Control Data Corporation
- Guenther O. Langner
- G01 - MEASURING TESTING
Information Patent Grant
Miniature electron gun with focusing grid structure
- Patent number 4,661,741
- Issue date Apr 28, 1987
- Control Data Corporation
- John Valun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular all-electrostatic electron-optical column and assembly of s...
- Patent number 4,661,709
- Issue date Apr 28, 1987
- Control Data Corporation
- David M. Walker
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for exposing multi-level registered patterns i...
- Patent number 4,467,211
- Issue date Aug 21, 1984
- Control Data Corporation
- Donald O. Smith
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for exposing multi-level registered patterns i...
- Patent number 4,430,571
- Issue date Feb 7, 1984
- Control Data Corporation
- Donald O. Smith
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam array lithography system employing multiple parallel...
- Patent number 4,390,789
- Issue date Jun 28, 1983
- Control Data Corporation
- Donald O. Smith
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam structure having electrostatic coarse and fin...
- Patent number 4,342,949
- Issue date Aug 3, 1982
- Control Data Corporation
- Kenneth J. Harte
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Unipotential lens assembly for charged particle beam tubes and meth...
- Patent number 4,338,548
- Issue date Jul 6, 1982
- Control Data Corporation
- David C. Bono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and means for dynamic correction of electrostatic deflector...
- Patent number 4,142,132
- Issue date Feb 27, 1979
- Control Data Corporation
- Kenneth J. Harte
- G11 - INFORMATION STORAGE

Patents Applicationslast 30 patents

Information Patent Application
Laser doping
- Publication number 20110185971
- Publication date Aug 4, 2011
- UVTech Systems, Inc.
- David J. Elliott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING SUBSTRATE EDGES
- Publication number 20110168672
- Publication date Jul 14, 2011
- UVTech Systems, Inc.
- Kenneth J. Harte
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MODULAR APPARATUS FOR WAFER EDGE PROCESSING
- Publication number 20110147350
- Publication date Jun 23, 2011
- UVTech Systems Inc.
- Ronald P. Millman, JR.
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ORTHOGONAL BEAM DELIVERY SYSTEM FOR WAFER EDGE PROCESSING
- Publication number 20110147352
- Publication date Jun 23, 2011
- UVTech Systems Inc.
- Kenneth J. Harte
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING SUBSTRATE EDGES
- Publication number 20110139757
- Publication date Jun 16, 2011
- Ronald P. Millman, JR.
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FIBER-OPTIC BEAM DELIVERY SYSTEM FOR WAFER EDGE PROCESSING
- Publication number 20110139759
- Publication date Jun 16, 2011
- UVTech Systems Inc.
- Ronald P. Millman, JR.
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Photoreactive Removal of Ion Implanted Resist
- Publication number 20110061679
- Publication date Mar 17, 2011
- UVTech Systems, Inc.
- David J. Elliott
- B08 - CLEANING
Information Patent Application
LASER OPTICAL SYSTEM
- Publication number 20090323739
- Publication date Dec 31, 2009
- UV TECH SYSTEMS
- David J. Elliott
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser optical system
- Publication number 20080151951
- Publication date Jun 26, 2008
- David J. Elliott
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for delivery of pulsed laser radiation
- Publication number 20070224768
- Publication date Sep 27, 2007
- UVTech Systems, Inc.
- Victoria M. Chaplick
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Photoreactive removal of ion implanted resist
- Publication number 20070054492
- Publication date Mar 8, 2007
- David J. Elliott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning plasma reactor
- Publication number 20020069966
- Publication date Jun 13, 2002
- David J. Elliott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kenneth J. Harte

Person

Patents Grantslast 30 patents

Method and apparatus for processing substrate edges

Fiber-optic beam delivery system for wafer edge processing

Method and apparatus for processing substrate edges

Orthogonal beam delivery system for wafer edge processing

Scanning plasma reactor

Shaped biocompatible radiation shield and method for making same

Apparatus for local radiation therapy

Support system for a radiation treatment apparatus

Apparatus for local radiation therapy

Apparatus for local radiation therapy

X-ray apparatus for applying a predetermined flux to an interior su...

Apparatus for applying a predetermined x-radiation flux to an inter...

Optical beam homogenizing apparatus and method

Method for treating brain tumors

X-ray source with flexible probe

X-ray source with shaped radiation pattern

Switched electron beam source employing a common photo-emitter cath...

Electron beam source employing a photo-emitter cathode

Height measurement and correction method for electron beam lithogra...

Multiple channel electron beam optical column lithography system an...

All electrostatic electron optical sub-system for variable electron...

Method for measurement of spotsize and edgewidth in electron beam l...

Miniature electron gun with focusing grid structure

Modular all-electrostatic electron-optical column and assembly of s...

Method and apparatus for exposing multi-level registered patterns i...

Method and apparatus for exposing multi-level registered patterns i...

Electron beam array lithography system employing multiple parallel...

Charged particle beam structure having electrostatic coarse and fin...

Unipotential lens assembly for charged particle beam tubes and meth...

Method and means for dynamic correction of electrostatic deflector...

Patents Applicationslast 30 patents

Laser doping

METHOD AND APPARATUS FOR PROCESSING SUBSTRATE EDGES

MODULAR APPARATUS FOR WAFER EDGE PROCESSING

ORTHOGONAL BEAM DELIVERY SYSTEM FOR WAFER EDGE PROCESSING

METHOD AND APPARATUS FOR PROCESSING SUBSTRATE EDGES

FIBER-OPTIC BEAM DELIVERY SYSTEM FOR WAFER EDGE PROCESSING

Photoreactive Removal of Ion Implanted Resist

LASER OPTICAL SYSTEM

Laser optical system

Method and apparatus for delivery of pulsed laser radiation

Photoreactive removal of ion implanted resist

Scanning plasma reactor