Kenneth J. Krzeczowski

Person

Scotts Valley, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Structural modification using electron beam activated chemical etch
- Patent number 8,052,885
- Issue date Nov 8, 2011
- KLA-Tencor Corporation
- Mehran Naser-Ghodsi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etch selectivity enhancement in electron beam activated chemical etch
- Patent number 7,879,730
- Issue date Feb 1, 2011
- KLA-Tencor Technologies Corporation
- Mehran Naser-Ghodsi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for e-beam dark imaging with perspective control
- Patent number 7,838,833
- Issue date Nov 23, 2010
- KLA-Tencor Technologies Corporation
- Matthew Lent
- G01 - MEASURING TESTING
Information Patent Grant
Three-dimensional imaging using electron beam activated chemical etch
- Patent number 7,709,792
- Issue date May 4, 2010
- KLA-Tencor Technologies Corporation
- Mehran Naser-Ghodsi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle microscopy using super resolution
- Patent number 7,598,492
- Issue date Oct 6, 2009
- KLA-Tencor Technologies Corporation
- Kenneth J. Krzeczowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic centering for behind-the-lens dark field imaging
- Patent number 7,525,090
- Issue date Apr 28, 2009
- KLA-Tencor Technologies Corporation
- Kenneth J. Krzeczowski
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
THREE-DIMENSIONAL IMAGING USING ELECTRON BEAM ACTIVATED CHEMICAL ETCH
- Publication number 20070158562
- Publication date Jul 12, 2007
- KLA-Tencor Technologies Corporation
- MEHRAN NASSER-GHODSI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURAL MODIFICATION USING ELECTRON BEAM ACTIVATED CHEMICAL ETCH
- Publication number 20070158303
- Publication date Jul 12, 2007
- KLA-Tencor Technologies Corporation
- MEHRAN NASSER-GHODSI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCH SELECTIVITY ENHANCEMENT IN ELECTRON BEAM ACTIVATED CHEMICAL ETCH
- Publication number 20070158304
- Publication date Jul 12, 2007
- KLA-Tencor Technologies Corporation
- Mehran Nasser-Ghodsi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Systems for Creating a Recipe for a Defect Review Process
- Publication number 20070067134
- Publication date Mar 22, 2007
- KLA-TENCOR TECHNOLOGIES CORP.
- S. Mark Borowicz
- G06 - COMPUTING CALCULATING COUNTING

Kenneth J. Krzeczowski

Person

Patents Grantslast 30 patents

Structural modification using electron beam activated chemical etch

Etch selectivity enhancement in electron beam activated chemical etch

Apparatus and method for e-beam dark imaging with perspective control

Three-dimensional imaging using electron beam activated chemical etch

Charged particle microscopy using super resolution

Dynamic centering for behind-the-lens dark field imaging

Patents Applicationslast 30 patents

THREE-DIMENSIONAL IMAGING USING ELECTRON BEAM ACTIVATED CHEMICAL ETCH

STRUCTURAL MODIFICATION USING ELECTRON BEAM ACTIVATED CHEMICAL ETCH

ETCH SELECTIVITY ENHANCEMENT IN ELECTRON BEAM ACTIVATED CHEMICAL ETCH

Methods and Systems for Creating a Recipe for a Defect Review Process