Kenneth L. Blaedel

Follow

Person

Dublin, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Compliant layer chucking surface
- Patent number 6,835,415
- Issue date Dec 28, 2004
- EUV LLC
- Kenneth L. Blaedel
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Compliant layer chucking surface
- Publication number 20040131775
- Publication date Jul 8, 2004
- The Regents of the University of California.
- Kenneth L. Blaedel
- H01 - BASIC ELECTRIC ELEMENTS