Kenneth L. Starks

Follow

Person

Gloucester, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature controlled ion source
- Patent number 10,262,833
- Issue date Apr 16, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques for anisotropic substrate etching
- Patent number 10,193,066
- Issue date Jan 29, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Glen F. R. Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled ion source
- Patent number 9,859,098
- Issue date Jan 2, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION USING DIRECTION...
- Publication number 20190276931
- Publication date Sep 12, 2019
- Bencherki Mebarki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND TECHNIQUES FOR ANISOTROPIC SUBSTRATE ETCHING
- Publication number 20190006587
- Publication date Jan 3, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Glen F. R. Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature Controlled Ion Source
- Publication number 20180090297
- Publication date Mar 29, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature Controlled Ion Source
- Publication number 20170178857
- Publication date Jun 22, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique for reducing backside particles
- Publication number 20060124155
- Publication date Jun 15, 2006
- David Edwin Suuronen
- B08 - CLEANING