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Kenneth P. MacWilliams
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Los Gatos, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods for making dual-damascene dielectric structures
Patent number
7,501,339
Issue date
Mar 10, 2009
Lam Research Corporation
Jay E. Uglow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for making dual-damascene dielectric structures
Patent number
7,060,605
Issue date
Jun 13, 2006
Lam Research Corporation
Jay E. Uglow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual-damascene dielectric structures
Patent number
6,909,190
Issue date
Jun 21, 2005
Lam Research Corporation
Jay E. Uglow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low dielectric constant etch stop films
Patent number
6,417,092
Issue date
Jul 9, 2002
Novellus Systems, Inc.
Sanjeev Jain
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual-damascene dielectric structures and methods for making the same
Patent number
6,251,770
Issue date
Jun 26, 2001
LAM Research Corp.
Jay E. Uglow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing using antireflective layer having high wet...
Patent number
6,214,526
Issue date
Apr 10, 2001
Novellus Systems, Inc.
Srinivasan Sundararajan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Methods for making dual-damascene dielectric structures
Publication number
20060166485
Publication date
Jul 27, 2006
LAM RESEARCH CORPORATION, AND NOVELLUS SYSTEMS, INC.
Jay E. Uglow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Low dielectric constant etch stop films
Publication number
20030036280
Publication date
Feb 20, 2003
Novellus System, Inc.
Sanjeev Jain
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL - DAMASCENE DIELECTRIC STRUCTURES
Publication number
20010010970
Publication date
Aug 2, 2001
Jay E. Uglow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for making dual-damascene dielectric structures
Publication number
20010009803
Publication date
Jul 26, 2001
Jay E. Uglow
H01 - BASIC ELECTRIC ELEMENTS