Kenneth P. Regan

Person

Manchester, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Compensated location specific processing apparatus and method
- Patent number 10,861,674
- Issue date Dec 8, 2020
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compensated location specific processing apparatus and method
- Patent number 10,497,540
- Issue date Dec 3, 2019
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for beam deflection in a gas cluster ion beam...
- Patent number 9,540,725
- Issue date Jan 10, 2017
- TEL Epion Inc.
- Kenneth Regan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck power supply
- Patent number 8,169,769
- Issue date May 1, 2012
- TEL Epion Inc.
- Kenneth P. Regan
- G01 - MEASURING TESTING
Information Patent Grant
Electrostatic chuck power supply
- Patent number 7,948,734
- Issue date May 24, 2011
- TEL Epion Inc.
- Kenneth P. Regan
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Self-biasing active load circuit and related power supply for use i...
- Patent number 7,834,327
- Issue date Nov 16, 2010
- TEL Epion Inc.
- Kenneth P. Regan
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for arc suppression in scanned ion beam proces...
- Patent number 7,345,856
- Issue date Mar 18, 2008
- TEL Epion Inc.
- Kenneth P. Regan
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
Compensated Location Specific Processing Apparatus And Method
- Publication number 20200066485
- Publication date Feb 27, 2020
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPENSATED LOCATION SPECIFIC PROCESSING APPARATUS AND METHOD
- Publication number 20180197715
- Publication date Jul 12, 2018
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR BEAM DEFLECTION IN A GAS CLUSTER ION BEAM...
- Publication number 20150332924
- Publication date Nov 19, 2015
- TEL Epion Inc.
- Kenneth Regan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-VOLTAGE GAS CLUSTER ION BEAM (GCIB) PROCESSING SYSTEM
- Publication number 20110240602
- Publication date Oct 6, 2011
- TEL Epion Inc.
- Robert K. Becker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK POWER SUPPLY
- Publication number 20100182036
- Publication date Jul 22, 2010
- TEL Epion Inc.
- Kenneth P. Regan
- G01 - MEASURING TESTING
Information Patent Application
SELF-BIASING ACTIVE LOAD CIRCUIT AND RELATED POWER SUPPLY FOR USE I...
- Publication number 20100072393
- Publication date Mar 25, 2010
- TEL Epion Inc.
- Kenneth P. Regan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK POWER SUPPLY
- Publication number 20100061033
- Publication date Mar 11, 2010
- TEL Epion Inc.
- Kenneth P. Regan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for arc suppression in scanned ion beam proces...
- Publication number 20060087244
- Publication date Apr 27, 2006
- Epion Corporation
- Kenneth P. Regan
- H01 - BASIC ELECTRIC ELEMENTS

Kenneth P. Regan

Person

Patents Grantslast 30 patents

Compensated location specific processing apparatus and method

Compensated location specific processing apparatus and method

Method and apparatus for beam deflection in a gas cluster ion beam...

Electrostatic chuck power supply

Electrostatic chuck power supply

Self-biasing active load circuit and related power supply for use i...

Method and apparatus for arc suppression in scanned ion beam proces...

Patents Applicationslast 30 patents

Compensated Location Specific Processing Apparatus And Method

COMPENSATED LOCATION SPECIFIC PROCESSING APPARATUS AND METHOD

METHOD AND APPARATUS FOR BEAM DEFLECTION IN A GAS CLUSTER ION BEAM...

HIGH-VOLTAGE GAS CLUSTER ION BEAM (GCIB) PROCESSING SYSTEM

ELECTROSTATIC CHUCK POWER SUPPLY

SELF-BIASING ACTIVE LOAD CIRCUIT AND RELATED POWER SUPPLY FOR USE I...

ELECTROSTATIC CHUCK POWER SUPPLY

Method and apparatus for arc suppression in scanned ion beam proces...