Kenneth Tsai

Person

Emerald Hills, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrochemical removal of tantalum-containing materials
- Patent number 9,068,273
- Issue date Jun 30, 2015
- Quantum Global Technologies LLC
- Hong Wang
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Electrochemical removal of tantalum-containing materials
- Patent number 7,964,085
- Issue date Jun 21, 2011
- Applied Materials, Inc.
- Hong Wang
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Guard for electrostatic chuck
- Patent number 6,944,006
- Issue date Sep 13, 2005
- Applied Materials, Inc.
- Hui Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonant chamber applicator for remote plasma source
- Patent number 6,603,269
- Issue date Aug 5, 2003
- Applied Materials, Inc.
- Be Van Vo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monitoring an effluent from a chamber
- Patent number 6,592,817
- Issue date Jul 15, 2003
- Applied Materials, Inc.
- Kenneth Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for aligning a substrate on a support member
- Patent number 6,374,508
- Issue date Apr 23, 2002
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for aligning and controlling edge deposition o...
- Patent number 6,328,808
- Issue date Dec 11, 2001
- Applied Materials, Inc.
- Kenneth Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for improved remote microwave plasma source for use with sub...
- Patent number 6,271,148
- Issue date Aug 7, 2001
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for delivering a gas
- Patent number 6,248,176
- Issue date Jun 19, 2001
- Applied Materials, Inc.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anti-notch thinning heater
- Patent number 6,210,483
- Issue date Apr 3, 2001
- Applied Materials, Inc.
- Ken Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for aligning and controlling edge deposition o...
- Patent number 6,186,092
- Issue date Feb 13, 2001
- Applied Materials, Inc.
- Kenneth Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for aligning a substrate on a support member
- Patent number 6,146,463
- Issue date Nov 14, 2000
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for improved remote microwave plasma source for use with...
- Patent number 6,026,762
- Issue date Feb 22, 2000
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for delivering a gas
- Patent number 5,985,033
- Issue date Nov 16, 1999
- Applied Materials, Inc.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROCHEMICAL REMOVAL OF TANTALUM-CONTAINING MATERIALS
- Publication number 20120000793
- Publication date Jan 5, 2012
- Hong Wang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
In-situ monitoring of target erosion
- Publication number 20060081459
- Publication date Apr 20, 2006
- APPLIED MATERIALS, INC.
- Kenneth Chien-Quen Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Profile detection and refurbishment of deposition targets
- Publication number 20060021870
- Publication date Feb 2, 2006
- APPLIED MATERIALS, INC.
- Kenneth Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reduced oxygen arc spray
- Publication number 20060024440
- Publication date Feb 2, 2006
- APPLIED MATERIALS, INC.
- Kenneth Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Chamber component having knurled surface
- Publication number 20060005767
- Publication date Jan 12, 2006
- APPLIED MATERIALS, INC.
- Kenneth Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Guard for electrostatic chuck
- Publication number 20040196613
- Publication date Oct 7, 2004
- APPLIED MATERIALS, INC.
- Hui Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Microwave heat shield for plasma chamber
- Publication number 20030066486
- Publication date Apr 10, 2003
- Applied Materials, Inc.
- Bo Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for improved remote microwave plasma source for use with...
- Publication number 20010042513
- Publication date Nov 22, 2001
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kenneth Tsai

Person

Patents Grantslast 30 patents

Electrochemical removal of tantalum-containing materials

Electrochemical removal of tantalum-containing materials

Guard for electrostatic chuck

Resonant chamber applicator for remote plasma source

Monitoring an effluent from a chamber

Apparatus and method for aligning a substrate on a support member

Apparatus and method for aligning and controlling edge deposition o...

Method for improved remote microwave plasma source for use with sub...

Apparatus and method for delivering a gas

Anti-notch thinning heater

Apparatus and method for aligning and controlling edge deposition o...

Apparatus and method for aligning a substrate on a support member

Apparatus for improved remote microwave plasma source for use with...

Apparatus and method for delivering a gas

Patents Applicationslast 30 patents

ELECTROCHEMICAL REMOVAL OF TANTALUM-CONTAINING MATERIALS

In-situ monitoring of target erosion

Profile detection and refurbishment of deposition targets

Reduced oxygen arc spray

Chamber component having knurled surface

Guard for electrostatic chuck

Microwave heat shield for plasma chamber

Apparatus for improved remote microwave plasma source for use with...