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Kenneth Vavala
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Middletown, DE, US
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last 30 patents
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Patent Grant
Method of manufacturing grooved chemical mechanical polishing layers
Patent number
9,034,063
Issue date
May 19, 2015
Rohm and Haas Electronic Materials CMP Holdings, Inc.
Jeffrey James Hendron
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
Method of manufacturing grooved chemical mechanical polishing layers
Publication number
20140083018
Publication date
Mar 27, 2014
Rohm and Haas Electronic Materials CMP Holdings, INC.
Jeffrey James Hendron
B24 - GRINDING POLISHING