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Kenneth W. Nill
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Lexington, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
CD-GISAXS system and method
Patent number
7,920,676
Issue date
Apr 5, 2011
Xradia, Inc.
Wenbing Yun
G01 - MEASURING TESTING
Information
Patent Grant
Element-specific X-ray fluorescence microscope and method of operation
Patent number
7,245,696
Issue date
Jul 17, 2007
Xradia, Inc.
Wenbing Yun
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Element-specific X-ray fluorescence microscope and method of operation
Patent number
7,183,547
Issue date
Feb 27, 2007
Xradia, Inc.
Wenbing Yun
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Achromatic fresnel optics based lithography for short wavelength el...
Patent number
6,885,503
Issue date
Apr 26, 2005
Xradia, Inc.
Wenbing Yun
G02 - OPTICS
Information
Patent Grant
Scanning laser spectrometer
Patent number
4,410,273
Issue date
Oct 18, 1983
Laser Analytics, Inc.
Arlan W. Mantz
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
CD-GISAXS System and Method
Publication number
20080273662
Publication date
Nov 6, 2008
Xradia, Inc.
Wenbing Yun
G01 - MEASURING TESTING
Information
Patent Application
Back-end-of-line metallization inspection and metrology microscopy...
Publication number
20050282300
Publication date
Dec 22, 2005
Xradia, Inc.
Wenbing Yun
G01 - MEASURING TESTING
Information
Patent Application
Element-specific X-ray fluorescence microscope and method of operation
Publication number
20050109936
Publication date
May 26, 2005
Xradia, Inc.
Wenbing Yun
G01 - MEASURING TESTING
Information
Patent Application
Achromatic fresnel optics based lithography for short wavelength el...
Publication number
20040085641
Publication date
May 6, 2004
XRADIA, INC.
Wenbing Yun
G02 - OPTICS
Information
Patent Application
Element-specific X-ray fluorescence microscope and method of operation
Publication number
20030223536
Publication date
Dec 4, 2003
Xradia, Inc.
Wenbing Yun
G01 - MEASURING TESTING