Kensei Yamamoto

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Koshi-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system
- Patent number 8,206,076
- Issue date Jun 26, 2012
- Tokyo Electron Limited
- Issei Ueda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing method, substrate processing apparatus, and co...
- Patent number 7,618,203
- Issue date Nov 17, 2009
- Tokyo Electron Limited
- Syuzo Fujimaru
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20090003825
- Publication date Jan 1, 2009
- TOKYO ELECTRON LIMITED
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...
- Publication number 20080241715
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Syuzo FUJIMARU
- H01 - BASIC ELECTRIC ELEMENTS