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Kenshiro ASAHI
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Nirasaki City, Yamanashi, JP
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last 30 patents
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Patent Grant
Etching method
Patent number
11,127,597
Issue date
Sep 21, 2021
Tokyo Electron Limited
Reiko Sasahara
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20240006187
Publication date
Jan 4, 2024
Tokyo Electron Limited
Toshinori DEBARI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
GAS TREATMENT APPARATUS
Publication number
20220301821
Publication date
Sep 22, 2022
TOKYO ELECTRON LIMITED
Yuji SAEGUSA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
ETCHING METHOD
Publication number
20200111674
Publication date
Apr 9, 2020
TOKYO ELECTRON LIMITED
Reiko SASAHARA
H01 - BASIC ELECTRIC ELEMENTS