Kenshiro NAGAHAMA

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Oyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Optical element angle adjustment device and extreme ultraviolet lig...
- Patent number 10,627,640
- Issue date Apr 21, 2020
- Gigaphoton Inc.
- Kenshiro Nagahama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20250183610
- Publication date Jun 5, 2025
- Gigaphoton Inc.
- Yuki KAWASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL ELEMENT ANGLE ADJUSTMENT DEVICE AND EXTREME ULTRAVIOLET LIG...
- Publication number 20190113765
- Publication date Apr 18, 2019
- Gigaphoton Inc.
- Kenshiro NAGAHAMA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR