Kenshiro Ohtsubo

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Defect inspection apparatus and defect inspection method
- Patent number 12,196,673
- Issue date Jan 14, 2025
- HITACHI HIGH-TECH CORPORATION
- Takeru Utsugi
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system
- Patent number 9,535,009
- Issue date Jan 3, 2017
- Hitachi High-Technologies Corporation
- Kenshiro Ohtsubo
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
WAFER INSPECTION APPARATUS
- Publication number 20250004043
- Publication date Jan 2, 2025
- Hitachi High-Tech Corporation
- Yoshihiro SATOU
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION DEVICE
- Publication number 20240280483
- Publication date Aug 22, 2024
- Hitachi High-Tech Corporation
- Takeru UTSUGI
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE HOLDING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230163018
- Publication date May 25, 2023
- HITACHI HIGH-TECH CORPORATION
- Yoshihiro SATOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD
- Publication number 20230060883
- Publication date Mar 2, 2023
- HITACHI HIGH-TECH CORPORATION
- Takeru UTSUGI
- G01 - MEASURING TESTING
Information Patent Application
Substrate Inspection Device
- Publication number 20230017599
- Publication date Jan 19, 2023
- Hitachi High-Tech Corporation
- Yoshihiro SATOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION SYSTEM
- Publication number 20150131087
- Publication date May 14, 2015
- Hitachi High-Technologies Corporation
- Kenshiro Ohtsubo
- G01 - MEASURING TESTING