Kensuke HIGUCHI

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Nirasaki City, JP

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Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING TITANIUM NITRIDE FILM AND APPARATUS FOR FORMING...
- Publication number 20230030762
- Publication date Feb 2, 2023
- TOKYO ELECTRON LIMITED
- Kensuke HIGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TITANIUM NITRIDE FILM FORMING METHOD AND TITANIUM NITRIDE FILM FORM...
- Publication number 20220356565
- Publication date Nov 10, 2022
- TOKYO ELECTRON LIMITED
- Tsuyoshi TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...