Kensuke TANIGUCHI

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Treatment method
- Patent number 11,728,176
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Kiyohito Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 11,557,485
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Yoshihide Kihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 11,094,551
- Issue date Aug 17, 2021
- Tokyo Electron Limited
- Yoshihide Kihara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20210320011
- Publication date Oct 14, 2021
- TOKYO ELECTRON LIMITED
- Yoshihide KIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENT METHOD
- Publication number 20210313187
- Publication date Oct 7, 2021
- TOKYO ELECTRON LIMITED
- Kiyohito ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200194274
- Publication date Jun 18, 2020
- TOKYO ELECTRON LIMITED
- Yoshihide KIHARA
- H01 - BASIC ELECTRIC ELEMENTS