Kent R. Becker

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Fairfax, VT, US

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Patents Grantslast 30 patents

Information Patent Grant
In-situ automated CMP wedge conditioner
- Patent number 6,273,797
- Issue date Aug 14, 2001
- International Business Machines Corporation
- Kent R. Becker
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer edge cleaning
- Patent number 6,186,873
- Issue date Feb 13, 2001
- International Business Machines Corporation
- Kent R. Becker
- B08 - CLEANING