Kenta KATO

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma source and plasma processing apparatus
- Patent number 12,340,977
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Kenta Kato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND MICROWAVE RADIATION SOURCE
- Publication number 20230178339
- Publication date Jun 8, 2023
- TOKYO ELECTRON LIMITED
- Kenta KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SOURCE AND PLASMA PROCESSING APPARATUS
- Publication number 20230081103
- Publication date Mar 16, 2023
- TOKYO ELECTRON LIMITED
- Kenta KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230031447
- Publication date Feb 2, 2023
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS