Kenta Shibasaki

Person

  • Koshi City, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    CLEANING JIG, COATING APPARATUS, AND CLEANING METHOD

    • Publication number 20240207908
    • Publication date Jun 27, 2024
    • TOKYO ELECTRON LIMITED
    • Satoshi SHIMMURA
    • B08 - CLEANING
  • Information Patent Application

    SOLUTION TREATMENT APPARATUS AND CLEANING METHOD

    • Publication number 20240085813
    • Publication date Mar 14, 2024
    • TOKYO ELECTRON LIMITED
    • Kenta SHIBASAKI
    • B08 - CLEANING
  • Information Patent Application

    LIQUID PROCESSING APPARATUS

    • Publication number 20240012329
    • Publication date Jan 11, 2024
    • TOKYO ELECTRON LIMITED
    • Junghyun KIM
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    LIQUID PROCESSING APPARATUS

    • Publication number 20240009697
    • Publication date Jan 11, 2024
    • TOKYO ELECTRON LIMITED
    • Junghyun KIM
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    SOLUTION TREATMENT APPARATUS AND CLEANING METHOD

    • Publication number 20220113643
    • Publication date Apr 14, 2022
    • TOKYO ELECTRON LIMITED
    • Kenta SHIBASAKI
    • B08 - CLEANING
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS

    • Publication number 20210039131
    • Publication date Feb 11, 2021
    • TOKYO ELECTRON LIMITED
    • Satoshi Shimmura
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...