Kentaro Asakura

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Stage device and substrate processing apparatus
- Patent number 12,094,753
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Melvin Verbaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-point thermocouples and assemblies for ceramic heating struct...
- Patent number 11,774,298
- Issue date Oct 3, 2023
- Tokyo Electron Limited
- Melvin Verbaas
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus and substrate delivery method
- Patent number 11,664,266
- Issue date May 30, 2023
- Tokyo Electron Limited
- Yuichiro Wagatsuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation device
- Patent number 10,221,478
- Issue date Mar 5, 2019
- Tokyo Electron Limited
- Kensaku Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mounting table structure and heat treatment apparatus
- Patent number 8,183,502
- Issue date May 22, 2012
- Tokyo Electron Limited
- Kentaro Asakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for in-situ refurbishing a ceramic substrate holder
- Patent number 7,989,353
- Issue date Aug 2, 2011
- Tokyo Electron Limited
- Tadahiro Ishizaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for performing semiconductor processing on target substrate
- Patent number 7,422,655
- Issue date Sep 9, 2008
- Tokyo Electron Limited
- Kentaro Asakura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PLACING METHOD AND SUBSTRATE PLACING MECHANISM
- Publication number 20230122317
- Publication date Apr 20, 2023
- TOKYO ELECTRON LIMITED
- Koichi NAKAJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220013402
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Melvin VERBAAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-POINT THERMOCOUPLES AND ASSEMBLIES FOR CERAMIC HEATING STRUCT...
- Publication number 20210247240
- Publication date Aug 12, 2021
- TOKYO ELECTRON LIMITED
- Melvin Verbaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE DELIVERY METHOD
- Publication number 20210005505
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Yuichiro WAGATSUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE, SUBSTRATE PROCESSING APPARATUS AND STAGE ASSEMBLING METHOD
- Publication number 20210005502
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Yuichiro WAGATSUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film Formation Device
- Publication number 20160083837
- Publication date Mar 24, 2016
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR IN-SITU REFURBISHING A CERAMIC SUBSTRATE HOLDER
- Publication number 20090166327
- Publication date Jul 2, 2009
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOUNTING TABLE STRUCTURE AND HEAT TREATMENT APPARATUS
- Publication number 20090095731
- Publication date Apr 16, 2009
- TOKYO ELECTRON LIMITED
- Kentaro Asakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate placing mechanism
- Publication number 20070089672
- Publication date Apr 26, 2007
- Akinori Shimamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for applying semiconductor treatment to treatment subject su...
- Publication number 20060219178
- Publication date Oct 5, 2006
- TOKYO ELECTRON LIMITED
- Kentaro Asakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film deposition system
- Publication number 20040168642
- Publication date Sep 2, 2004
- Kentaro Asakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film forming device
- Publication number 20020166509
- Publication date Nov 14, 2002
- Kentaro Asakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kentaro Asakura

Person

Patents Grantslast 30 patents

Stage device and substrate processing apparatus

Multi-point thermocouples and assemblies for ceramic heating struct...

Substrate processing apparatus and substrate delivery method

Film formation device

Mounting table structure and heat treatment apparatus

Method for in-situ refurbishing a ceramic substrate holder

Apparatus for performing semiconductor processing on target substrate

Patents Applicationslast 30 patents

SUBSTRATE PLACING METHOD AND SUBSTRATE PLACING MECHANISM

STAGE DEVICE AND SUBSTRATE PROCESSING APPARATUS

MULTI-POINT THERMOCOUPLES AND ASSEMBLIES FOR CERAMIC HEATING STRUCT...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE DELIVERY METHOD

STAGE, SUBSTRATE PROCESSING APPARATUS AND STAGE ASSEMBLING METHOD

Film Formation Device

METHOD FOR IN-SITU REFURBISHING A CERAMIC SUBSTRATE HOLDER

MOUNTING TABLE STRUCTURE AND HEAT TREATMENT APPARATUS

Substrate placing mechanism

Device for applying semiconductor treatment to treatment subject su...

Film deposition system

Film forming device