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San Jose, CA, US
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Patents Grants
last 30 patents
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Patent Grant
System and method for scheduling the movement of wafers in a wafer-...
Patent number
6,711,454
Issue date
Mar 23, 2004
Tokyo Electron, Ltd.
Kentaro Joma
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
System and method for scheduling the movement of wafers in a wafer-...
Patent number
6,535,784
Issue date
Mar 18, 2003
Tokyo Electron, Ltd.
Kentaro Joma
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Patents Applications
last 30 patents
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Patent Application
System and method for scheduling the movement of wafers in a wafer-...
Publication number
20030120371
Publication date
Jun 26, 2003
Kentaro Joma
G05 - CONTROLLING REGULATING
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Patent Application
System and method for scheduling the movement of wafers in a wafer-...
Publication number
20020160621
Publication date
Oct 31, 2002
Kentaro Joma
G05 - CONTROLLING REGULATING