Kentaro Kadonaga

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method, film forming apparatus and storage medium
- Patent number 9,562,285
- Issue date Feb 7, 2017
- Tokyo Electron Limited
- Keisuke Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming boron-containing silicon oxycarbonitride film and...
- Patent number 9,142,403
- Issue date Sep 22, 2015
- Tokyo Electron Limited
- Kentaro Kadonaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and apparatus
- Patent number 9,076,649
- Issue date Jul 7, 2015
- Tokyo Electron Limited
- Keisuke Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method for forming boron-added silicon nitride film
- Patent number 9,034,718
- Issue date May 19, 2015
- Tokyo Electron Limited
- Keisuke Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming silicon oxycarbonitride film
- Patent number 8,871,655
- Issue date Oct 28, 2014
- Tokyo Electron Limited
- Keisuke Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 8,753,717
- Issue date Jun 17, 2014
- Tokyo Electron Limited
- Keisuke Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and apparatus for forming silicon-containing...
- Patent number 8,034,673
- Issue date Oct 11, 2011
- Tokyo Electron Limited
- Kentaro Kadonaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation method and apparatus for semiconductor process
- Patent number 7,964,241
- Issue date Jun 21, 2011
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS AND STORAGE MEDIUM
- Publication number 20150259796
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Keisuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND APPARATUS
- Publication number 20130323935
- Publication date Dec 5, 2013
- Keisuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING BORON-CONTAINING SILICON OXYCARBONITRIDE FILM AND...
- Publication number 20130260576
- Publication date Oct 3, 2013
- TOKYO ELECTRON LIMITED
- Kentaro Kadonaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STABILIZATION METHOD OF FILM FORMING APPARATUS AND FILM FORMING APP...
- Publication number 20130239893
- Publication date Sep 19, 2013
- TOKYO ELECTRON LIMITED
- Keisuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SILICON OXYCARBONITRIDE FILM
- Publication number 20130164946
- Publication date Jun 27, 2013
- TOKYO ELECTRON LIMITED
- Keisuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE U...
- Publication number 20130037873
- Publication date Feb 14, 2013
- TOKYO ELECTRON LIMITED
- Keisuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20120321791
- Publication date Dec 20, 2012
- TOKYO ELECTRON LIMITED
- Keisuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND APPARATUS FOR FORMING SILICON-CONTAINING...
- Publication number 20090263975
- Publication date Oct 22, 2009
- TOKYO ELECTRON LIMITED
- Kentaro KADONAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film formation method and apparatus for semiconductor process
- Publication number 20080063791
- Publication date Mar 13, 2008
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kentaro Kadonaga

Person

Patents Grantslast 30 patents

Film forming method, film forming apparatus and storage medium

Method of forming boron-containing silicon oxycarbonitride film and...

Film forming method and apparatus

Film forming method for forming boron-added silicon nitride film

Method of forming silicon oxycarbonitride film

Film forming method and film forming apparatus

Film formation method and apparatus for forming silicon-containing...

Film formation method and apparatus for semiconductor process

Patents Applicationslast 30 patents

FILM FORMING METHOD, FILM FORMING APPARATUS AND STORAGE MEDIUM

FILM FORMING METHOD AND APPARATUS

METHOD OF FORMING BORON-CONTAINING SILICON OXYCARBONITRIDE FILM AND...

STABILIZATION METHOD OF FILM FORMING APPARATUS AND FILM FORMING APP...

METHOD OF FORMING SILICON OXYCARBONITRIDE FILM

FILM FORMING METHOD, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE U...

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM FORMATION METHOD AND APPARATUS FOR FORMING SILICON-CONTAINING...

Film formation method and apparatus for semiconductor process