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Kentaro Okuda
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Kanagawa, JP
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Patents Grants
last 30 patents
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Patent Grant
Inspection system and method for inspecting line width and/or posit...
Patent number
9,406,117
Issue date
Aug 2, 2016
NuFlare Technology, Inc.
Takanao Touya
G01 - MEASURING TESTING
Information
Patent Grant
Inspection system and method for inspecting line width and/or posit...
Patent number
9,036,896
Issue date
May 19, 2015
Nuflare Technology, Inc.
Takanao Touya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Photomask and method for manufacturing the same
Patent number
8,778,570
Issue date
Jul 15, 2014
Kabushiki Kaisha Toshiba
Kentaro Okuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern defect inspection method and apparatus
Patent number
5,574,800
Issue date
Nov 12, 1996
Kabushiki Kaisha Toshiba
Hiromu Inoue
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
INSPECTION SYSTEM AND METHOD FOR INSPECTING LINE WIDTH AND/OR POSIT...
Publication number
20150193918
Publication date
Jul 9, 2015
NuFlare Technology, Inc.
Takanao Touya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TEMPLATE, MANUFACTURING METHOD OF THE TEMPLATE, AND POSITION MEASUR...
Publication number
20140205702
Publication date
Jul 24, 2014
Kabushiki Kaisha Toshiba
Hidenori SATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOMASK AND METHOD FOR MANUFACTURING THE SAME
Publication number
20120225374
Publication date
Sep 6, 2012
Kabushiki Kaisha Toshiba
Kentaro OKUDA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INSPECTION SYSTEM AND METHOD FOR INSPECTING LINE WIDTH AND/OR POSIT...
Publication number
20110255770
Publication date
Oct 20, 2011
Kabushiki Kaisha Toshiba
Takanao Touya
G06 - COMPUTING CALCULATING COUNTING