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Shizuoka, JP
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Patents Grants
last 30 patents
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Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
8,912,513
Issue date
Dec 16, 2014
NuFlare Technology, Inc.
Kentaro Omi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Charged Particle Beam Writing Apparatus and Charged Particle Beam W...
Publication number
20130250282
Publication date
Sep 26, 2013
NuFlare Technology, Inc.
Kentaro Omi
B82 - NANO-TECHNOLOGY