Kentaro Sano

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Drawing apparatus and method of manufacturing article
- Patent number 8,993,985
- Issue date Mar 31, 2015
- Canon Kabushiki Kaisha
- Kentaro Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drawing apparatus and method of manufacturing article
- Patent number 8,748,841
- Issue date Jun 10, 2014
- Canon Kabushiki Kaisha
- Kentaro Sano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle optical system, drawing apparatus, and method of m...
- Patent number 8,716,672
- Issue date May 6, 2014
- Canon Kabushiki Kaisha
- Kentaro Sano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Drawing apparatus and method of manufacturing article
- Patent number 8,704,192
- Issue date Apr 22, 2014
- Canon Kabushiki Kaisha
- Kentaro Sano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Drawing apparatus and method of manufacturing article
- Patent number 8,610,082
- Issue date Dec 17, 2013
- Canon Kabushiki Kaisha
- Kentaro Sano
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DRAWING APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20150037731
- Publication date Feb 5, 2015
- Canon Kabushiki Kaisha
- Kentaro SANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20140158903
- Publication date Jun 12, 2014
- Canon Kabushiki Kaisha
- Kentaro Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20140065549
- Publication date Mar 6, 2014
- Canon Kabushiki Kaisha
- Takahiro Nakayama
- B82 - NANO-TECHNOLOGY
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURE OF PRODUCT
- Publication number 20130344443
- Publication date Dec 26, 2013
- Takayuki Kawamoto
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE OPTICAL SYSTEM, DRAWING APPARATUS, AND METHOD OF M...
- Publication number 20130273478
- Publication date Oct 17, 2013
- Canon Kabushiki Kaisha
- Kentaro Sano
- B82 - NANO-TECHNOLOGY
Information Patent Application
DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20120295202
- Publication date Nov 22, 2012
- Canon Kabushiki Kaisha
- Kentaro Sano
- B82 - NANO-TECHNOLOGY
Information Patent Application
DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20120295203
- Publication date Nov 22, 2012
- Canon Kabushiki Kaisha
- Kentaro Sano
- B82 - NANO-TECHNOLOGY
Information Patent Application
DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20120241641
- Publication date Sep 27, 2012
- Canon Kabushiki Kaisha
- Kentaro Sano
- B82 - NANO-TECHNOLOGY

Kentaro Sano

Person

Patents Grantslast 30 patents

Drawing apparatus and method of manufacturing article

Drawing apparatus and method of manufacturing article

Charged particle optical system, drawing apparatus, and method of m...

Drawing apparatus and method of manufacturing article

Drawing apparatus and method of manufacturing article

Patents Applicationslast 30 patents

DRAWING APPARATUS AND ARTICLE MANUFACTURING METHOD

DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE

DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURE OF PRODUCT

CHARGED PARTICLE OPTICAL SYSTEM, DRAWING APPARATUS, AND METHOD OF M...

DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE

DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE

DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE