Kentaro Sera

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film deposition method
- Patent number 8,658,247
- Issue date Feb 25, 2014
- Tokyo Electron Limited
- Toshiyuki Ikeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS
- Publication number 20120190215
- Publication date Jul 26, 2012
- TOKYO ELECTRON LIMITED
- Toshiyuki IKEUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...