Kentaro SUGIMOTO

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Kyoto-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning substrate processing apparatus
- Patent number 9,802,227
- Issue date Oct 31, 2017
- SCREEN Holdings Co., Ltd.
- Naoyuki Osada
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method usin...
- Patent number 9,378,988
- Issue date Jun 28, 2016
- SCREEN Holdings Co., Ltd.
- Naoyuki Osada
- B08 - CLEANING
Information Patent Grant
Method of cleaning substrate processing apparatus
- Patent number 9,190,300
- Issue date Nov 17, 2015
- SCREEN Holdings Co., Ltd.
- Naoyuki Osada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS
- Publication number 20160016206
- Publication date Jan 21, 2016
- SCREEN Holdings Co., Ltd.
- Naoyuki OSADA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20130020284
- Publication date Jan 24, 2013
- Naoyuki OSADA
- B08 - CLEANING
Information Patent Application
METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS
- Publication number 20120273011
- Publication date Nov 1, 2012
- Naoyuki OSADA
- B08 - CLEANING