Kentaro Wada

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Chiba-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate support with clamping electrical connector
- Patent number 7,354,288
- Issue date Apr 8, 2008
- Applied Materials, Inc.
- Kazutoshi Maehara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Substrate support with clamping electrical connector
- Publication number 20060272774
- Publication date Dec 7, 2006
- APPLIED MATERIALS, INC.
- Kazutoshi Maehara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...