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Kentaro Yamamura
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Koshi-Shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Cleaning and drying-preventing method, and cleaning and drying-prev...
Patent number
8,512,478
Issue date
Aug 20, 2013
Tokyo Electron Limited
Yasuyuki Kometani
B08 - CLEANING
Information
Patent Grant
Cleaning and drying-preventing method, and cleaning and drying-prev...
Patent number
8,216,390
Issue date
Jul 10, 2012
Tokyo Electron Limited
Yasuyuki Kometani
B08 - CLEANING
Information
Patent Grant
Substrate cleaning method and developing apparatus
Patent number
7,901,514
Issue date
Mar 8, 2011
Tokyo Electron Limited
Junji Nakamura
B08 - CLEANING
Information
Patent Grant
Substrate cleaning method and developing apparatus
Patent number
7,604,013
Issue date
Oct 20, 2009
Tokyo Electron Limited
Junji Nakamura
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
Publication number
20220359243
Publication date
Nov 10, 2022
TOKYO ELECTRON LIMITED
Toshiki NAEKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING AND DRYING-PREVENTING METHOD, AND CLEANING AND DRYING-PREV...
Publication number
20120255581
Publication date
Oct 11, 2012
TOKYO ELECTRON LIMITED
Yasuyuki Kometani
B08 - CLEANING
Information
Patent Application
CLEANING AND DRYING-PREVENTING METHOD, AND CLEANING AND DRYING-PREV...
Publication number
20100051059
Publication date
Mar 4, 2010
TOKYO ELECTRON LIMITED
Yasuyuki Kometani
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING METHOD AND DEVELOPING APPARATUS
Publication number
20090272407
Publication date
Nov 5, 2009
TOKYO ELECTRON LIMITED
Junji Nakamura
B08 - CLEANING
Information
Patent Application
Substrate cleaning method and developing apparatus
Publication number
20060048792
Publication date
Mar 9, 2006
TOKYO ELECTRON LIMITED
Junji Nakamura
B08 - CLEANING